- 专利标题: Block-to-block reticle inspection
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申请号: US15707791申请日: 2017-09-18
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公开(公告)号: US10539512B2公开(公告)日: 2020-01-21
- 发明人: Abdurrahman Sezginer , Patrick LoPresti , Joe Blecher , Rui-fang Shi , Yalin Xiong , John Fielden
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: G06K9/62
- IPC分类号: G06K9/62 ; G01N21/88 ; G01N21/958 ; G06T7/00
摘要:
Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.
公开/授权文献
- US20180003647A1 Block-to-Block Reticle Inspection 公开/授权日:2018-01-04
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