Invention Grant
- Patent Title: Semiconductor device with dummy hole
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Application No.: US15724600Application Date: 2017-10-04
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Publication No.: US10541336B2Publication Date: 2020-01-21
- Inventor: Junhyung Lim , Jaybum Kim , Kyoungseok Son , Jihun Lim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2017-0025705 20170227
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L21/322 ; H01L51/52 ; H01L29/423 ; H01L27/32 ; H01L29/04 ; H01L27/12

Abstract:
A semiconductor device may include a base substrate, a first thin-film transistor (“TFT”) provided on the base substrate, a second TFT provided on the base substrate, and a plurality of insulating layers provided on the base substrate to define at least one dummy hole that is not overlapped with the first and second TFTs. The first TFT may include a first input electrode, a first output electrode, a first control electrode, and a first semiconductor pattern including a crystalline semiconductor material, and the second TFT may include a second input electrode, a second output electrode, a second control electrode, and a second semiconductor pattern including an oxide semiconductor material. A shortest distance between the at least one dummy hole and the second semiconductor pattern may be equal to or shorter than 5 micrometers (μm), in a plan view.
Public/Granted literature
- US20180248045A1 SEMICONDUCTOR DEVICE Public/Granted day:2018-08-30
Information query
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