Invention Grant
- Patent Title: Energy filter and charged particle beam system
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Application No.: US15890585Application Date: 2018-02-07
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Publication No.: US10546714B2Publication Date: 2020-01-28
- Inventor: Kazuya Omoto
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2017-21166 20170208
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/28 ; H01J37/147

Abstract:
There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter (100) includes a first sector magnet (10) and a second sector magnet (20). The first and second magnets (10, 20) are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S2). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A2).
Public/Granted literature
- US20180301314A1 Energy Filter and Charged Particle Beam System Public/Granted day:2018-10-18
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