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    Transmission electron microscope
    2.
    发明授权
    Transmission electron microscope 有权
    透射电子显微镜

    公开(公告)号：US09018581B2

    公开(公告)日：2015-04-28

    申请号：US13757939

    申请日：2013-02-04

    Applicant: JEOL Ltd.

    Inventor： Kazuya Omoto

    IPC: H01J37/10 ,  H01J37/153 ,  H01J37/05 ,  H01J37/04 ,  H01J37/26

    CPC classification number: H01J37/10 ,  H01J37/04 ,  H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/1532

    Abstract: A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).

    Abstract translation: 透射电子显微镜（100）包括电子束源（2），照明透镜（10），物镜（20），中间透镜系统（30），位于中间的后面的一对转印透镜 透镜系统（30）和能量过滤器（60），用于根据能量分离透过样本（S）的光束L的电子。 传送透镜（40）将第一图像传送到能量过滤器（60）的入口交叉平面（S1），并将第二图像传送到过滤器（60）的入射图像平面（A1）。 在第一转印透镜（40a）和第二转印透镜（40b）之间形成像平面（A3）。

    Energy Filter and Charged Particle Beam System
    3.
    发明申请
    Energy Filter and Charged Particle Beam System 审中-公开

    公开(公告)号：US20180301314A1

    公开(公告)日：2018-10-18

    申请号：US15890585

    申请日：2018-02-07

    Applicant: JEOL Ltd.

    Inventor： Kazuya Omoto

    IPC: H01J37/05 ,  H01J37/28 ,  H01J37/147

    CPC classification number: H01J37/05 ,  H01J37/1472 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/24485 ,  H01J2237/2802

    Abstract: There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter (100) includes a first sector magnet (10) and a second sector magnet (20). The first and second magnets (10, 20) are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S2). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A2).

    Transmission Electron Microscope
    4.
    发明申请
    Transmission Electron Microscope 有权
    透射电子显微镜

    公开(公告)号：US20130206987A1

    公开(公告)日：2013-08-15

    申请号：US13757939

    申请日：2013-02-04

    Applicant: JEOL LTD.

    Inventor： Kazuya Omoto

    IPC: H01J37/10 ,  H01J37/153 ,  H01J37/05

    CPC classification number: H01J37/10 ,  H01J37/04 ,  H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/0492 ,  H01J2237/057 ,  H01J2237/1532

    Abstract: A transmission electron microscope (100) includes an electron beam source (2), an illumination lens (10), an objective lens (20), an intermediate lens system (30), a pair of transfer lenses (40) located behind the intermediate lens system (30), and an energy filter (60) for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses (40) transfer the first image to the entrance crossover plane (S1) of the energy filter (60) and to transfer the second image to the entrance image plane (A1) of the filter (60). An image plane (A3) is formed between the first transfer lens (40a) and the second transfer lens (40b).

    Abstract translation: 透射电子显微镜（100）包括电子束源（2），照明透镜（10），物镜（20），中间透镜系统（30），位于中间的后面的一对转印透镜 透镜系统（30）和能量过滤器（60），用于根据能量分离透过样本（S）的光束L的电子。 传送透镜（40）将第一图像传送到能量过滤器（60）的入口交叉平面（S1），并将第二图像传送到过滤器（60）的入射图像平面（A1）。 在第一转印透镜（40a）和第二转印透镜（40b）之间形成像平面（A3）。

    Energy filter and charged particle beam apparatus
    5.
    发明授权
    Energy filter and charged particle beam apparatus 有权

    公开(公告)号：US11043353B2

    公开(公告)日：2021-06-22

    申请号：US16827156

    申请日：2020-03-23

    Applicant: JEOL Ltd.

    Inventor： Kazuya Omoto

    IPC: H01J37/05

    Abstract: An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.

    Energy Filter and Charged Particle Beam Apparatus
    6.
    发明申请
    Energy Filter and Charged Particle Beam Apparatus 审中-公开

    公开(公告)号：US20200321185A1

    公开(公告)日：2020-10-08

    申请号：US16827156

    申请日：2020-03-23

    Applicant: JEOL Ltd.

    Inventor： Kazuya Omoto

    IPC: H01J37/05

    Abstract: An energy filter has a plurality of sector magnets which are configured symmetrically with respect to a symmetry plane, and forms a real image on the symmetry plane. The energy filter include: an entrance aperture provided with a slit having a longitudinal direction in a direction perpendicular to an energy dispersion direction; and a hexapole and a quadrupole disposed on the symmetry plane.

    Energy filter and charged particle beam system
    7.
    发明授权
    Energy filter and charged particle beam system 有权

    公开(公告)号：US10546714B2

    公开(公告)日：2020-01-28

    申请号：US15890585

    申请日：2018-02-07

    Applicant: JEOL Ltd.

    Inventor： Kazuya Omoto

    IPC: H01J37/05 ,  H01J37/28 ,  H01J37/147

    Abstract: There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter (100) includes a first sector magnet (10) and a second sector magnet (20). The first and second magnets (10, 20) are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S2). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A2).

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