Invention Grant
- Patent Title: Ceramic ring test device
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Application No.: US15817599Application Date: 2017-11-20
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Publication No.: US10551328B2Publication Date: 2020-02-04
- Inventor: Satoru Kobayashi , Yufei Zhu , Saurabh Garg , Soonam Park , Dmitry Lubomirsky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G01N22/00
- IPC: G01N22/00

Abstract:
A test fixture includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The inner conductor includes a top portion having a first diameter, a bottom portion having a second diameter, and a third portion proximate the bottom portion that has a third diameter that is less than the second diameter and is greater than the first diameter. An electrical property of a chamber component disposed within the outer conductor is measurable based on application of a signal to at least one of the outer conductor or the inner conductor.
Public/Granted literature
- US20180073994A1 CERAMIC RING TEST DEVICE Public/Granted day:2018-03-15
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