- 专利标题: Displacement devices and methods for fabrication, use and control of same
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申请号: US15920309申请日: 2018-03-13
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公开(公告)号: US10554110B2公开(公告)日: 2020-02-04
- 发明人: Xiaodong Lu , Irfan-Ur-Rab Usman
- 申请人: The University of British Columbia
- 申请人地址: CA Vancouver
- 专利权人: The University of British Columbia
- 当前专利权人: The University of British Columbia
- 当前专利权人地址: CA Vancouver
- 代理机构: Todd A. Rattray, Oyen Wiggs Green & Mutala LLP
- 主分类号: H02K41/02
- IPC分类号: H02K41/02 ; H02K21/24 ; H02K41/03 ; H02K1/27 ; H02K3/28 ; H02K7/09 ; H01L21/67 ; H02K1/26
摘要:
Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.
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