Invention Grant
- Patent Title: Shearing interferometer using two opposing shearing plates for laser
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Application No.: US16154807Application Date: 2018-10-09
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Publication No.: US10557756B2Publication Date: 2020-02-11
- Inventor: Emil Aslanov , Alexander Voronov , Gyoo Wan Han
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2017-0157157 20171123
- Main IPC: G01J9/02
- IPC: G01J9/02

Abstract:
A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.
Public/Granted literature
- US20190154514A1 SHEARING INTERFEROMETER FOR LASER Public/Granted day:2019-05-23
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