Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16269797Application Date: 2019-02-07
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Publication No.: US10559581B2Publication Date: 2020-02-11
- Inventor: Tomohiro Yamashita , Tamotsu Ogata , Masamichi Fujito , Tomoya Saito
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Tokyo
- Agency: Shapiro, Gabor and Rosenberger, PLLC
- Priority: JP2017-090251 20170428
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/11573 ; H01L49/02 ; H01L27/11568 ; H01L21/8238 ; H01L29/423 ; H01L29/66 ; H01L27/06 ; H01L29/78 ; H01L29/792 ; H01L29/94 ; H01L27/1157 ; H01L29/417

Abstract:
To downsize a semiconductor device that includes a non-volatile memory and a capacitive element on a semiconductor substrate. In a capacitive element region of a main surface of a semiconductor substrate, fins protruding from the main surface are arranged along the Y direction while extending in the X direction. In the capacitive element region of the main surface of the semiconductor substrate, capacitor electrodes of the capacitive elements are alternately arranged along the X direction while intersecting the fins. The fins are formed in a formation step of other fins which are arranged in a memory cell array of the non-volatile memory of the semiconductor substrate. One capacitor electrode is formed in a formation step of a control gate electrode of the non-volatile memory. Another capacitor electrode is formed in a formation step of a memory gate electrode of the non-volatile memory.
Public/Granted literature
- US20190172837A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-06-06
Information query
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