Invention Grant
- Patent Title: Vertical memory devices with conductive pads supported by dummy channels with varying dimensions
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Application No.: US15871478Application Date: 2018-01-15
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Publication No.: US10559585B2Publication Date: 2020-02-11
- Inventor: Kyoung-Hoon Kim , Hong-Soo Kim , Tae-Hee Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2017-0060927 20170517
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/11575 ; H01L27/11556 ; H01L23/522

Abstract:
A vertical memory device includes a conductive pattern structure on a first region of a substrate, the conductive pattern structure including a stack of interleaved conductive patterns and insulation layers. A pad structure is disposed on a second region of the substrate adjacent the first region of the substrate wherein edges of the conductive patterns are disposed at spaced apart points along a first direction to provide conductive pads arranged as respective steps in a staircase arrangement. A plurality of channel structures extends through the conductive pattern structure and a plurality of dummy channel structures extends through the pad structure. Respective contact plugs are disposed on the conductive pads. Numbers of the dummy channel structures per unit area passing through the conductive pads vary. Widths of the dummy channel structures passing through the conductive pads may also vary.
Public/Granted literature
- US20180337192A1 VERTICAL MEMORY DEVICES WITH CONDUCTIVE PADS SUPPORTED BY DUMMY CHANNELS WITH VARYING DIMENSIONS Public/Granted day:2018-11-22
Information query
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