Invention Grant
- Patent Title: Backside integration of RF filters for RF front end modules and design structure
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Application No.: US15690828Application Date: 2017-08-30
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Publication No.: US10559743B2Publication Date: 2020-02-11
- Inventor: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L41/293
- IPC: H01L41/293 ; H01L21/768 ; H01L23/48 ; H01L23/00 ; H03H9/64 ; G06F17/50 ; H01L41/08 ; H01L41/25 ; H01L23/66 ; H01L25/16 ; H01L27/06 ; H01L49/02
Abstract:
A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.
Public/Granted literature
- US20170365775A1 BACKSIDE INTEGRATION OF RF FILTERS FOR RF FRONT END MODULES AND DESIGN STRUCTURE Public/Granted day:2017-12-21
Information query
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