公开(公告)号：US20170365775A1

公开(公告)日：2017-12-21

申请号：US15690828

申请日：2017-08-30

Applicant: GLOBALFOUNDRIES INC.

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H01L41/293 ,  H01L41/25 ,  G06F17/50 ,  H01L21/768 ,  H01L23/00 ,  H01L41/08 ,  H03H9/64 ,  H01L23/48 ,  H01L27/06 ,  H01L25/16 ,  H01L23/66 ,  H01L49/02

Abstract: A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.

公开(公告)号：US10559743B2

公开(公告)日：2020-02-11

申请号：US15690828

申请日：2017-08-30

Applicant: GLOBALFOUNDRIES INC.

Inventor： James W. Adkisson ,  Panglijen Candra ,  Thomas J. Dunbar ,  Jeffrey P. Gambino ,  Mark D. Jaffe ,  Anthony K. Stamper ,  Randy L. Wolf

IPC: H01L41/293 ,  H01L21/768 ,  H01L23/48 ,  H01L23/00 ,  H03H9/64 ,  G06F17/50 ,  H01L41/08 ,  H01L41/25 ,  H01L23/66 ,  H01L25/16 ,  H01L27/06 ,  H01L49/02

Abstract: A design structure for an integrated radio frequency (RF) filter on a backside of a semiconductor substrate includes: a device on a first side of a substrate; a radio frequency (RF) filter on a backside of the substrate; and at least one substrate conductor extending from the front side of the substrate to the backside of the substrate and electrically coupling the RF filter to the device.