Invention Grant
- Patent Title: Polyurethane CMP pads having a high modulus ratio
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Application No.: US15273855Application Date: 2016-09-23
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Publication No.: US10562149B2Publication Date: 2020-02-18
- Inventor: Lin Fu , Rui Ma , Nathan Speer , Chen-Chih Tsai , Kathryn Bergman
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B37/04 ; B24B37/22 ; B24D18/00 ; B24B37/14

Abstract:
A chemical-mechanical polishing pad comprising a polyurethane polishing layer having a high storage modulus at low temperatures and a low storage modulus at high temperatures is disclosed. For example, the disclosed pad embodiments may be fabricated from a thermoplastic polyurethane having a ratio of storage modulus at 25 degrees C. to storage modulus at 80 degrees C. of 50 or more. The thermoplastic polyurethane polishing layer may further optionally have a Shore D hardness of 70 or more, a tensile elongation of 320 percent or less, a storage modulus at 25 degrees C. of 1200 MPa or more, and/or a storage modulus at 80 degrees C. of 15 MPa or less.
Public/Granted literature
- US20170087688A1 POLYURETHANE CMP PADS HAVING A HIGH MODULUS RATIO Public/Granted day:2017-03-30
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