Invention Grant
- Patent Title: Normally-off HEMT transistor with selective generation of 2DEG channel, and manufacturing method thereof
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Application No.: US16004272Application Date: 2018-06-08
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Publication No.: US10566450B2Publication Date: 2020-02-18
- Inventor: Ferdinando Iucolano , Giuseppe Greco , Fabrizio Roccaforte
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102017000064147 20170609
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/20 ; H01L29/66 ; H01L29/10 ; H01L29/423 ; H01L23/29 ; H01L23/31 ; H01L29/737 ; H01L29/417 ; H01L29/207

Abstract:
A normally-off HEMT transistor includes a heterostructure including a channel layer and a barrier layer on the channel layer; a 2DEG layer in the heterostructure; an insulation layer in contact with a first region of the barrier layer; and a gate electrode through the whole thickness of the insulation layer, terminating in contact with a second region of the barrier layer. The barrier layer and the insulation layer have a mismatch of the lattice constant (“lattice mismatch”), which generates a mechanical stress solely in the first region of the barrier layer, giving rise to a first concentration of electrons in a first portion of the two-dimensional conduction channel which is under the first region of the barrier layer which is greater than a second concentration of electrons in a second portion of the two-dimensional conduction channel which is under the second region of the barrier layer.
Public/Granted literature
- US20180358458A1 NORMALLY-OFF HEMT TRANSISTOR WITH SELECTIVE GENERATION OF 2DEG CHANNEL, AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-12-13
Information query
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