发明授权
- 专利标题： Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP)
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申请号： US15291756申请日： 2016-10-12
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公开(公告)号： US10566534B2公开(公告)日： 2020-02-18
- 发明人: Matthew King , William E. Quinn , Gregory McGraw , Siddharth Harikrishna Mohan , Elliot H. Hartford, Jr. , Benjamin Swedlove , Gregg Kottas , Tomasz Trojacki , Julia J. Brown
- 申请人： Universal Display Corporation
- 申请人地址： US NJ Ewing
- 专利权人： Universal Display Corporation
- 当前专利权人： Universal Display Corporation
- 当前专利权人地址： US NJ Ewing
- 代理机构： Morris & Kamlay LLP
- 主分类号： C23C14/12
- IPC分类号： C23C14/12 ; C23C14/24 ; H01L51/56 ; H01L51/00 ; H01L51/50 ; H01L51/52 ; C23C14/22
摘要：
Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.
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