Invention Grant
- Patent Title: MEMS assembly and method for producing a MEMS assembly
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Application No.: US16385475Application Date: 2019-04-16
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Publication No.: US10570007B2Publication Date: 2020-02-25
- Inventor: Gunar Lorenz , Bernd Goller
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102018208230 20180524
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B7/00 ; B81C1/00 ; H04R19/04

Abstract:
A MEMS assembly includes a package, wherein the package includes a substrate and a cover element, wherein a through opening is provided in the cover element, a MEMS component within the package on the cover element, an integrated circuit arrangement within the package on the substrate, and a support component within the package on the substrate, wherein the support component on the substrate is electrically coupled, by first electrical connection lines, to the MEMS component on the cover element and is electrically coupled, by second electrical connection lines, to the circuit arrangement on the substrate in order to produce an electrical connection between the MEMS component and the integrated circuit arrangement.
Public/Granted literature
- US20190359481A1 MEMS ASSEMBLY AND METHOD FOR PRODUCING A MEMS ASSEMBLY Public/Granted day:2019-11-28
Information query