MEMS assembly and method for producing a MEMS assembly

    公开(公告)号:US10570007B2

    公开(公告)日:2020-02-25

    申请号:US16385475

    申请日:2019-04-16

    Abstract: A MEMS assembly includes a package, wherein the package includes a substrate and a cover element, wherein a through opening is provided in the cover element, a MEMS component within the package on the cover element, an integrated circuit arrangement within the package on the substrate, and a support component within the package on the substrate, wherein the support component on the substrate is electrically coupled, by first electrical connection lines, to the MEMS component on the cover element and is electrically coupled, by second electrical connection lines, to the circuit arrangement on the substrate in order to produce an electrical connection between the MEMS component and the integrated circuit arrangement.

    MEMS ASSEMBLY AND METHOD FOR PRODUCING A MEMS ASSEMBLY

    公开(公告)号:US20190359481A1

    公开(公告)日:2019-11-28

    申请号:US16385475

    申请日:2019-04-16

    Abstract: A MEMS assembly includes a package, wherein the package includes a substrate and a cover element, wherein a through opening is provided in the cover element, a MEMS component within the package on the cover element, an integrated circuit arrangement within the package on the substrate, and a support component within the package on the substrate, wherein the support component on the substrate is electrically coupled, by first electrical connection lines, to the MEMS component on the cover element and is electrically coupled, by second electrical connection lines, to the circuit arrangement on the substrate in order to produce an electrical connection between the MEMS component and the integrated circuit arrangement.

    METHODS OF ENVIRONMENTAL PROTECTION FOR SILICON MEMS STRUCTURES IN CAVITY PACKAGES

    公开(公告)号:US20220369042A1

    公开(公告)日:2022-11-17

    申请号:US17660239

    申请日:2022-04-22

    Abstract: A sound transducer device includes a multilayer component board having a first side and an opposite second side, and a sound port extending between the first and second sides of the multilayer component board. The sound transducer also includes a MEMS sound transducer die including a suspended membrane structure, wherein the MEMS sound transducer die is arranged at the first side of the multilayer component board such that the suspended membrane structure is in fluid communication with the sound port. The sound transducer also includes a mesh structure for providing an environmental barrier, the mesh structure covering the sound port from either one of the first and second sides of the multilayer component board.

Patent Agency Ranking