Invention Grant
- Patent Title: Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test
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Application No.: US15821101Application Date: 2017-11-22
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Publication No.: US10571487B2Publication Date: 2020-02-25
- Inventor: Daniel Mark Bock , Tim Cleary
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law, P.C.
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/302

Abstract:
Contact engines, probe head assemblies, probe systems, and associated methods for on-wafer testing of the wireless operation of a device under test (DUT). A contact engine includes a flexible dielectric membrane having a first surface and a second surface and a plurality of probes supported by the flexible dielectric membrane. The plurality of probes are oriented to contact a plurality of contact locations on the DUT. Each probe in the plurality of probes includes a corresponding probe tip that projects from the second surface of the flexible dielectric membrane and is configured to electrically and physically contact a corresponding contact location of the plurality of contact locations. The contact engine further includes at least one membrane antenna supported by the flexible dielectric membrane. A probe head assembly includes the contact engine. A probe system includes the probe head assembly. Associated methods include methods of utilizing the contact engine.
Public/Granted literature
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