Invention Grant
- Patent Title: Methods and systems for generating a three-dimensional holographic mask having topographical pattern with more than two discrete levels
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Application No.: US15274993Application Date: 2016-09-23
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Publication No.: US10571861B2Publication Date: 2020-02-25
- Inventor: Rajesh Menon , Peng Wang
- Applicant: University of Utah Research Foundation
- Applicant Address: US UT Salt Lake City
- Assignee: University of Utah Research Foundation
- Current Assignee: University of Utah Research Foundation
- Current Assignee Address: US UT Salt Lake City
- Agency: Thorpe North & Western, LLP
- Main IPC: G02B5/32
- IPC: G02B5/32 ; G03H1/00 ; G03H1/08 ; H01L21/306 ; H01L21/67
Abstract:
A system for surface patterning using a three dimensional holographic mask includes a light source configured to emit a light beam toward the holographic mask. The holographic mask can be formed as a topographical pattern on a transparent mask substrate. A semiconductor substrate can be positioned on an opposite site of the holographic mask as the light source and can be spaced apart from the holographic mask. The system can also include a base for supporting the semiconductor substrate.
Public/Granted literature
- US20170010585A1 METHODS AND SYSTEMS FOR GENERATING A THREE-DIMENSIONAL HOLOGRAPHIC MASK Public/Granted day:2017-01-12
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