Invention Grant
- Patent Title: Semiconductor structures including liners comprising alucone and related methods
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Application No.: US15244629Application Date: 2016-08-23
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Publication No.: US10573513B2Publication Date: 2020-02-25
- Inventor: Zhe Song , Tuman E. Allen , Cole S. Franklin , F. Daniel Gealy
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L45/00 ; H01L21/033 ; H01L27/24 ; H01L27/11582
Abstract:
A semiconductor device including stacked structures. The stacked structures include at least two chalcogenide materials or alternating dielectric materials and conductive materials. A liner including alucone is formed on sidewalls of the stacked structures. Methods of forming the semiconductor device are also disclosed.
Public/Granted literature
- US20160365514A1 SEMICONDUCTOR STRUCTURES INCLUDING LINERS COMPRISING ALUCONE AND RELATED METHODS Public/Granted day:2016-12-15
Information query
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