Invention Grant
- Patent Title: Integrated circuit device including asymmetrical fin field-effect transistor
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Application No.: US16417973Application Date: 2019-05-21
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Publication No.: US10573729B2Publication Date: 2020-02-25
- Inventor: Edward Namkyu Cho , Bo-ra Lim , Geum-jung Seong , Seung-hun Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2017-0106255 20170822
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L21/8238 ; H01L21/308 ; H01L29/78 ; H01L21/02 ; H01L29/08 ; H01L27/092 ; H01L27/11 ; H01L27/10 ; H01L29/165

Abstract:
An integrated circuit device includes: a first fin active region extending in a first direction parallel to a top surface of a substrate; a second fin active region extending in the first direction and spaced apart from the first fin active region in a second direction different from the first direction; a gate line intersecting the first and second fin active regions; a first source/drain region on one side of the gate line in the first fin active region; and a second source/drain region on one side of the gate line in the second fin active region and facing the first source/drain region, wherein a cross-section of the first source/drain region perpendicular to the first direction has an asymmetric shape with respect to a center line of the first source/drain region in the second direction extending in a third direction perpendicular to the top surface of the substrate.
Public/Granted literature
- US20190273153A1 IINTEGRATED CIRCUIT DEVICE INCLUDING ASYMMETRICAL FIN FIELD-EFFECT TRANSISTOR Public/Granted day:2019-09-05
Information query
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