Invention Grant
- Patent Title: Piezoelectric micro-machined ultrasonic transducer (PMUT) and method for manufacturing the PMUT
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Application No.: US15626824Application Date: 2017-06-19
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Publication No.: US10576500B2Publication Date: 2020-03-03
- Inventor: Francesco Foncellino , Flavio Francesco Villa , Andrea Di Matteo
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000131844 20161228
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01L41/29 ; B06B1/06 ; B06B1/02 ; H01L41/113 ; H01L41/293 ; H01L41/332

Abstract:
A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.
Public/Granted literature
- US20180178251A1 PIEZOELECTRIC MICRO-MACHINED ULTRASONIC TRANSDUCER (PMUT) AND METHOD FOR MANUFACTURING THE PMUT Public/Granted day:2018-06-28
Information query
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