公开(公告)号：US12058938B2

公开(公告)日：2024-08-06

申请号：US17722713

申请日：2022-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H10N30/30 ,  H02N2/18 ,  H10N30/01 ,  H10N30/03 ,  H10N30/06 ,  H10N30/082 ,  H10N30/853 ,  H10N30/87 ,  H10N30/88

CPC classification number: H10N30/308 ,  H02N2/186 ,  H10N30/01 ,  H10N30/03 ,  H10N30/06 ,  H10N30/082 ,  H10N30/304 ,  H10N30/8554 ,  H10N30/87 ,  H10N30/88

Abstract: A process for manufacturing a MEMS piezoelectric device includes: forming a membrane at a first surface of wafer of semiconductor material further having a second surface (the first and second surfaces being opposite along a vertical axis and extending parallel to a horizontal plane formed by first and second horizontal axes); forming a cavity within the wafer so that the membrane is suspended above the cavity; forming a piezoelectric material layer above a first surface of the membrane; forming an electrode arrangement in contact with the piezoelectric material layer; and forming a proof mass coupled to a second surface of the membrane opposite to the first surface along the vertical axis. The proof mass deforms the membrane in response to environmental mechanical vibrations. Forming the proof mass includes forming a connection element at a central position between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US10576500B2

公开(公告)日：2020-03-03

申请号：US15626824

申请日：2017-06-19

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco Foncellino ,  Flavio Francesco Villa ,  Andrea Di Matteo

IPC: H01L41/09 ,  H01L41/29 ,  B06B1/06 ,  B06B1/02 ,  H01L41/113 ,  H01L41/293 ,  H01L41/332

Abstract: A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.

公开(公告)号：US10987039B2

公开(公告)日：2021-04-27

申请号：US14558779

申请日：2014-12-03

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Andrea Di Matteo ,  Principia Dardano

IPC: A61B5/1486 ,  A61B5/145 ,  A61B5/00

Abstract: A microneedle array device includes a substrate and an array of microneedles on the substrate. Each microneedle includes a redox enzyme and redox mediator and an electrically conductive layer on the substrate. The electrically conductive layer may extend partway up each microneedle exposing the tip thereof.

公开(公告)号：US09910005B2

公开(公告)日：2018-03-06

申请号：US14951136

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G01N27/28 ,  C12Q1/00 ,  G01N33/543 ,  G01N27/327 ,  G01N27/403 ,  G03F7/00 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A biosensor includes a flexible foil with an electrode layer positioned on the foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

公开(公告)号：US20160077427A1

公开(公告)日：2016-03-17

申请号：US14951094

申请日：2015-11-24

Applicant: STMicroelectronics S.R.L.

Inventor： Andrea Di Matteo ,  Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Angela Cimmino

IPC: G03F7/00 ,  G01N27/403 ,  G03F7/26 ,  G03F7/16 ,  G03F7/20

CPC classification number: G01N27/28 ,  C12Q1/001 ,  G01N27/327 ,  G01N27/403 ,  G01N33/54386 ,  G03F7/0035 ,  G03F7/16 ,  G03F7/20 ,  G03F7/26

Abstract: A method for manufacturing a biosensor includes forming an electrode layer on a flexible foil. An adhesive layer is positioned on the foil layer, and a first photo-definable hydrogel membrane is positioned over the electrode layer and the adhesive layer. A second photo-definable hydrogel membrane with an immobilized bio-recognition element is positioned over the first hydrogel membrane in contact with the electrode layer through an opening in the first hydrogel membrane.

Abstract translation: 制造生物传感器的方法包括在柔性箔上形成电极层。 粘合剂层位于箔层上，并且第一可光定影的水凝胶膜位于电极层和粘合剂层之上。 具有固定化生物识别元件的第二光可定义水凝胶膜通过第一水凝胶膜中的开口定位在与电极层接触的第一水凝胶膜的上方。

公开(公告)号：US11417827B2

公开(公告)日：2022-08-16

申请号：US16215821

申请日：2018-12-11

Applicant: STMicroelectronics S.r.l.

Inventor： Maria Fortuna Bevilacqua ,  Flavio Francesco Villa ,  Rossana Scaldaferri ,  Valeria Casuscelli ,  Andrea Di Matteo ,  Dino Faralli

IPC: H01L41/00 ,  H01L41/113 ,  H01L41/047 ,  H01L41/22 ,  H02N2/18 ,  H01L41/053 ,  H01L41/187 ,  H01L41/25 ,  H01L41/29 ,  H01L41/332

Abstract: A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

公开(公告)号：US20210204847A1

公开(公告)日：2021-07-08

申请号：US17212045

申请日：2021-03-25

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Maria Fortuna Bevilacqua ,  Andrea Di Matteo ,  Principia Dardano

IPC: A61B5/1486 ,  A61B5/145

Abstract: A microneedle array device includes a substrate and an array of microneedles on the substrate. Each microneedle includes a redox enzyme and redox mediator and an electrically conductive layer on the substrate. The electrically conductive layer may extend partway up each microneedle exposing the tip thereof.

公开(公告)号：US20170236994A1

公开(公告)日：2017-08-17

申请号：US15582124

申请日：2017-04-28

Applicant: STMicroelectronics S.R.L.

Inventor： Angela Cimmino ,  Giovanna Salzillo ,  Valeria Casuscelli ,  Andrea Di Matteo

IPC: H01L41/187 ,  C04B35/626 ,  H01L41/35 ,  C04B35/64 ,  C04B35/624 ,  C04B35/49 ,  C04B35/622

CPC classification number: H01L41/1871 ,  C04B35/465 ,  C04B35/4682 ,  C04B35/49 ,  C04B35/62218 ,  C04B35/62222 ,  C04B35/624 ,  C04B35/6264 ,  C04B35/62675 ,  C04B35/62685 ,  C04B35/6325 ,  C04B35/63444 ,  C04B35/63488 ,  C04B35/64 ,  C04B2235/3208 ,  C04B2235/3215 ,  C04B2235/3232 ,  C04B2235/3234 ,  C04B2235/3236 ,  C04B2235/3244 ,  C04B2235/3249 ,  C04B2235/3251 ,  C04B2235/3262 ,  C04B2235/3293 ,  C04B2235/441 ,  C04B2235/449 ,  C04B2235/6567 ,  C04B2235/72 ,  C04B2235/768 ,  C04B2235/81 ,  C04B2235/96 ,  C08K3/08 ,  C09D1/00 ,  C09D7/61 ,  H01L41/35

Abstract: The present disclosure relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising: 1) at least one barium precursor compound; 2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound; 3) at least one anhydrous precursor compound of zirconium; 4) at least one anhydrous precursor compound of titanium; 5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, ketones, and mixtures thereof; and 6) a chelating agent, as well as method of using the same.

公开(公告)号：US09099529B2

公开(公告)日：2015-08-04

申请号：US14032067

申请日：2013-09-19

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Andrea Di Matteo ,  Luigi Giuseppe Occhipinti

IPC: H01L21/00 ,  H01L35/24 ,  H01L29/00 ,  H01L21/768 ,  H01L21/321 ,  H01L51/00 ,  H01L51/05

CPC classification number: H01L21/76805 ,  H01L21/32115 ,  H01L51/0018 ,  H01L51/0023 ,  H01L51/0516

Abstract: The present disclosure relates to microstructure devices, in which a conductive pattern is formed on the basis of a conductive polymer material. In order to avoid the deposition and processing of the sacrificial materials and reduce a negative influence of the lithography process on sensitive conductive polymer materials a one-layer patterning sequence is proposed, in which a trench pattern is formed in a dielectric material that is subsequently filled with the conductive polymer material.

Abstract translation: 本公开涉及其中基于导电聚合物材料形成导电图案的微结构器件。 为了避免牺牲材料的沉积和处理并减少光刻工艺对敏感导电聚合物材料的负面影响，提出了一种单层图案化顺序，其中沟槽图案形成在随后填充的电介质材料中 与导电聚合物材料。

公开(公告)号：US20140087552A1

公开(公告)日：2014-03-27

申请号：US14032067

申请日：2013-09-19

Applicant: STMicroelectronics S.r.l.

Inventor： Vincenza Di Palma ,  Andrea Di Matteo ,  Luigi Giuseppe Occhipinti

IPC: H01L21/768 ,  H01L21/321

CPC classification number: H01L21/76805 ,  H01L21/32115 ,  H01L51/0018 ,  H01L51/0023 ,  H01L51/0516

Abstract: The present disclosure relates to microstructure devices, in which a conductive pattern is formed on the basis of a conductive polymer material. In order to avoid the deposition and processing of the sacrificial materials and reduce a negative influence of the lithography process on sensitive conductive polymer materials a one-layer patterning sequence is proposed, in which a trench pattern is formed in a dielectric material that is subsequently filled with the conductive polymer material.

Abstract translation: 本公开涉及其中基于导电聚合物材料形成导电图案的微结构器件。 为了避免牺牲材料的沉积和处理并减少光刻工艺对敏感导电聚合物材料的负面影响，提出了一种单层图案化顺序，其中沟槽图案形成在随后填充的电介质材料中 与导电聚合物材料。