Invention Grant
- Patent Title: Imprint mold and manufacturing method of the same
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Application No.: US15793784Application Date: 2017-10-25
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Publication No.: US10583586B2Publication Date: 2020-03-10
- Inventor: Sung-Woo Choi , Chul-Ho Kim , Yun-Ho Kook
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Seed IP Law Group LLP
- Priority: KR10-2016-0139358 20161025
- Main IPC: B29C33/42
- IPC: B29C33/42 ; B29C33/38 ; G03F7/00 ; B29C33/02
Abstract:
An imprint mold includes a substrate; a pattern on the substrate and having a multi-layered structure; and an etch stop layer between an upper layer and a lower layer of the pattern.
Public/Granted literature
- US20180111291A1 IMPRINT MOLD AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2018-04-26
Information query
