Invention Grant
- Patent Title: Bonding apparatus and stack body manufacturing apparatus
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Application No.: US15804319Application Date: 2017-11-06
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Publication No.: US10583641B2Publication Date: 2020-03-10
- Inventor: Masakatsu Ohno , Yoshiharu Hirakata , Shingo Eguchi , Yasuhiro Jinbo , Hisao Ikeda , Kohei Yokoyama , Hiroki Adachi , Satoru Idojiri
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2013-184659 20130906; JP2014-029754 20140219
- Main IPC: B32B37/00
- IPC: B32B37/00 ; B32B38/18 ; B32B27/08 ; B32B27/20 ; B32B27/36 ; B32B37/12 ; B32B17/10 ; B32B38/00

Abstract:
A yield in the step of bonding two members together is improved. A bonding apparatus includes a stage capable of supporting a first member having a sheet-like shape, a fixing mechanism capable of fixing one end portion of a second member having a sheet-like shape so that the second member overlaps with the first member, and a pressurizing mechanism capable of moving from a side of the one end portion of the second member to a side of the other end portion and spreading a bonding layer under pressure between the first member and the second member. The first member and the second member are bonded to each other.
Public/Granted literature
- US20180072033A1 BONDING APPARATUS AND STACK BODY MANUFACTURING APPARATUS Public/Granted day:2018-03-15
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