Invention Grant
- Patent Title: Method for forming hermetic seals in MEMS devices
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Application No.: US15829314Application Date: 2017-12-01
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Publication No.: US10584027B2Publication Date: 2020-03-10
- Inventor: Arlynn W. Smith , Dan Chilcott
- Applicant: ELBIT SYSTEMS OF AMERICA, LLC
- Applicant Address: US TX Fort Worth
- Assignee: ELBIT SYSTEMS OF AMERICA, LLC
- Current Assignee: ELBIT SYSTEMS OF AMERICA, LLC
- Current Assignee Address: US TX Fort Worth
- Agency: K&L Gates LLP
- Main IPC: H01L23/02
- IPC: H01L23/02 ; B81C1/00 ; B81C3/00 ; G02B23/12 ; B32B3/30 ; B32B7/12 ; B32B9/04 ; B32B17/06 ; B32B37/12 ; B32B37/18 ; B81B7/00 ; C03C27/04

Abstract:
A method of processing a double sided wafer of a microelectromechanical device includes spinning a resist onto a first side of a first wafer. The method further includes forming pathways within the resist to expose portions of the first side of the first wafer. The method also includes etching one or more depressions in the first side of the first wafer through the pathways, where each of the depressions have a planar surface and edges. Furthermore, the method includes depositing one or more adhesion metals over the resist such that the one or more adhesion metals are deposited within the depressions, and then removing the resist from the first wafer. The method finally includes depositing indium onto the adhesion metals deposited within the depressions and bonding a second wafer to the first wafer by compressing the indium between the second wafer and the first wafer.
Public/Granted literature
- US20190169023A1 Method for Forming Hermetic Seals in MEMS Devices Public/Granted day:2019-06-06
Information query
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