- 专利标题： Temperature controlled showerhead
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申请号： US16291822申请日： 2019-03-04
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公开(公告)号： US10584415B2公开(公告)日： 2020-03-10
- 发明人: Henner Meinhold , Dan M. Doble , Stephen Lau , Vince Wilson , Easwar Srinivasan
- 申请人： Novellus Systems, Inc.
- 申请人地址： US CA San Jose
- 专利权人： Novellus Systems, Inc.
- 当前专利权人： Novellus Systems, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Weaver Austin Villeneuve & Sampson LLP
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/509 ; H01J37/32
摘要：
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
公开/授权文献
- US20190256977A1 TEMPERATURE CONTROLLED SHOWERHEAD 公开/授权日：2019-08-22
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