Invention Grant
- Patent Title: Method and device for characterizing an electron beam
-
Application No.: US15630199Application Date: 2017-06-22
-
Publication No.: US10586683B2Publication Date: 2020-03-10
- Inventor: Tomas Lock
- Applicant: Arcam AB
- Applicant Address: SE Moelndal
- Assignee: Arcam AB
- Current Assignee: Arcam AB
- Current Assignee Address: SE Moelndal
- Agency: Dinsmore & Shohl LLP
- Main IPC: H01J37/304
- IPC: H01J37/304 ; H01J37/305 ; H01J37/244 ; B23K15/00 ; G01T1/29 ; B33Y50/02 ; B29C64/386 ; H01J37/30 ; B29C64/20 ; B29C64/153 ; B33Y10/00 ; B33Y40/00 ; B22F3/105 ; B23K15/02 ; B28B1/00 ; B28B17/00 ; H01J37/317 ; H01J37/09 ; B33Y30/00

Abstract:
A device for detecting X-rays radiated out of a substrate surface, said device comprising at least one X-ray detector, a resolver grating and a modulator grating, said resolver grating with at least one opening facing towards said X-ray detector is arranged in front of said X-ray detector. Said modulator grating is provided between said resolver grating and said substrate at a predetermined distance from said resolver grating and said substrate, where said modulator grating having a plurality of openings in at least a first direction, wherein said x-rays from said surface is spatially modulated with said modulator grating and resolver grating.
Public/Granted literature
- US20170294288A1 METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM Public/Granted day:2017-10-12
Information query