Invention Grant
- Patent Title: Door opening/closing system, and load port equipped with door opening/closing system
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Application No.: US15750379Application Date: 2016-07-12
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Publication No.: US10586723B2Publication Date: 2020-03-10
- Inventor: Toshihiro Kawai , Yasushi Taniyama , Munekazu Komiya , Takashi Shigeta
- Applicant: SINFONIA TECHNOLOGY CO., LTD.
- Applicant Address: JP Minato-ku
- Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-154594 20150804
- International Application: PCT/JP2016/070567 WO 20160712
- International Announcement: WO2017/022431 WO 20170209
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673

Abstract:
A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.
Public/Granted literature
- US20180204753A1 DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENING/CLOSING SYSTEM Public/Granted day:2018-07-19
Information query
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