Invention Grant
- Patent Title: Hybrid fin cut with improved fin profiles
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Application No.: US16005073Application Date: 2018-06-11
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Publication No.: US10586736B2Publication Date: 2020-03-10
- Inventor: Haiting Wang , Ruilong Xie , Shesh Mani Pandey , Hui Zang , Garo Jacques Derderian , Scott Beasor
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Francois PagettE; Andrew M. Calderon
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/66 ; H01L27/088 ; H01L27/02 ; H01L21/308 ; H01L21/762

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a hybrid fin cut with improved fin profiles and methods of manufacture. The structure includes: a plurality of fin structures in a first region of a first density of fin structures; a plurality of fin structures in a second region of a second density of fin structures; and a plurality of fin structures in a third region of a third density of fin structures. The first density, second density and third density of fin structures are different densities of fin structures, and the plurality of fin structures in the first region, the second region and the third region have a substantially uniform profile.
Public/Granted literature
- US20190378763A1 HYBRID FIN CUT WITH IMPROVED FIN PROFILES Public/Granted day:2019-12-12
Information query
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