Invention Grant
- Patent Title: Method for fabricating flexible micromachined transducer device
-
Application No.: US15353695Application Date: 2016-11-16
-
Publication No.: US10586912B2Publication Date: 2020-03-10
- Inventor: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- Applicant: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- Applicant Address: US NH Lebanon
- Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee Address: US NH Lebanon
- Agency: Womble Bond Dickinson (US) LLP
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H01L41/29 ; B32B37/14 ; B06B1/06 ; H01L41/047 ; H01L41/09 ; B32B37/12 ; B32B37/18

Abstract:
A plurality of transducer elements are formed. For each of the plurality of transducer elements, an electrode of the transducer element is formed on a first side of a support layer. A piezoelectric element of the transducer element is formed on the first side of the support layer. An interconnect of the transducer element is formed in the support layer. The support layer is thinned to expose a second side of the support layer. The interconnects of the plurality of transducer elements extend between the first side and the second side of the support layer. The second side of the support layer is bonded to a flexible layer with an adhesive material. Conductive fillers are disposed in the adhesive material. The interconnects of the plurality of transducer elements are each electrically coupled via the conductive fillers to the corresponding interconnect extending through the flexible layer.
Public/Granted literature
- US20170062694A1 FLEXIBLE MICROMACHINED TRANSDUCER DEVICE AND METHOD FOR FABRICATING SAME Public/Granted day:2017-03-02
Information query
IPC分类: