Invention Grant
- Patent Title: Chip package with sidewall metallization
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Application No.: US15970413Application Date: 2018-05-03
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Publication No.: US10593615B2Publication Date: 2020-03-17
- Inventor: Andre Schmenn , Damian Sojka
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102017109670 20170505
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/498 ; H01L23/00 ; H01L21/78 ; H01L23/12 ; H01L23/14

Abstract:
A chip package and manufacturing method is disclosed. In one example, the method includes forming a carrier wafer with a plurality of trenches, each trench being at least partially covered with an electrically conductive sidewall coating. A semiconductor wafer is bonded on a front side of the carrier wafer. An electrically conductive connection structure is formed, including at least partially bridging a gap between the electrically conductive sidewall coating and an integrated circuit element of a respective one of the electronic chips. Material on a backside of the carrier wafer is removed to singularize the bonded wafers at the trenches into a plurality of semiconductor devices.
Public/Granted literature
- US20180323136A1 CHIP PACKAGE WITH SIDEWALL METALLIZATION Public/Granted day:2018-11-08
Information query
IPC分类: