Invention Grant
- Patent Title: Display substrate and manufacturing method thereof, display panel and display device
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Application No.: US15919489Application Date: 2018-03-13
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Publication No.: US10598981B2Publication Date: 2020-03-24
- Inventor: Feng Lu , Koji Shigamura
- Applicant: Shanghai Tianma Micro-Electronics Co., Ltd.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Priority: CN201710595628 20170720
- Main IPC: G02F1/1335
- IPC: G02F1/1335 ; G02F1/1362 ; G02F1/1368 ; G06F3/041 ; H01L27/12 ; H01L27/32 ; H01L51/52 ; G02F1/1333

Abstract:
The present disclosure provides a display substrate and a manufacturing method thereof, and a display panel. The display substrate has a display area and a peripheral area surrounding the display area, wherein a plurality of force sensors is provided in the peripheral area and the plurality of force sensors is made of polysilicon material, in a direction perpendicular to the display substrate, a first layer is provided directly under a layer where the plurality of force sensors is located, and a second layer is provided directly above the layer where the plurality of force sensors is located, a Young's modulus of at least one of the first layer and the second layer is larger than a Young's modulus of silicon oxide. The technical solution of the present disclosure can improve the detection accuracy of the force sensor with respect to a force.
Public/Granted literature
- US20190025637A1 DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, DISPLAY PANEL AND DISPLAY DEVICE Public/Granted day:2019-01-24
Information query
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