公开(公告)号：US10598981B2

公开(公告)日：2020-03-24

申请号：US15919489

申请日：2018-03-13

Applicant: Shanghai Tianma Micro-Electronics Co., Ltd.

Inventor： Feng Lu ,  Koji Shigamura

IPC: G02F1/1335 ,  G02F1/1362 ,  G02F1/1368 ,  G06F3/041 ,  H01L27/12 ,  H01L27/32 ,  H01L51/52 ,  G02F1/1333

Abstract: The present disclosure provides a display substrate and a manufacturing method thereof, and a display panel. The display substrate has a display area and a peripheral area surrounding the display area, wherein a plurality of force sensors is provided in the peripheral area and the plurality of force sensors is made of polysilicon material, in a direction perpendicular to the display substrate, a first layer is provided directly under a layer where the plurality of force sensors is located, and a second layer is provided directly above the layer where the plurality of force sensors is located, a Young's modulus of at least one of the first layer and the second layer is larger than a Young's modulus of silicon oxide. The technical solution of the present disclosure can improve the detection accuracy of the force sensor with respect to a force.