Invention Grant
- Patent Title: Dynamic care areas for defect detection
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Application No.: US15858264Application Date: 2017-12-29
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Publication No.: US10600175B2Publication Date: 2020-03-24
- Inventor: Bjorn Brauer , Benjamin Murray , Shishir Suman , Lisheng Gao
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/95 ; G01N21/88 ; G01N21/956 ; G06T7/73 ; G06F17/50

Abstract:
Systems and methods of a two-pass inspection methodology that dynamically creates micro care areas for inspection of repeater defects. Micro care areas can be formed around each location of a repeater defect. After inspection, additional repeater defects in the micro care areas can be identified. Attributes of the repeater defects can be compared and any repeater defects with attributes that deviate from an expected group attribute distribution can be classified as nuisance.
Public/Granted literature
- US20180276808A1 Dynamic Care Areas for Defect Detection Public/Granted day:2018-09-27
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