Invention Grant
- Patent Title: Frame mounting after foil expansion
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Application No.: US15860687Application Date: 2018-01-03
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Publication No.: US10600670B2Publication Date: 2020-03-24
- Inventor: Thomas Fischer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE102017100053 20170103
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/78 ; H01L21/67 ; H01L21/687 ; B28D5/00
Abstract:
An apparatus which comprises an expansion unit configured for expanding a foil, and a mounting unit configured for subsequently mounting the expanded foil on a frame and a workpiece, in particular a wafer, on the expanded foil.
Public/Granted literature
- US20180190530A1 Frame mounting after foil expansion Public/Granted day:2018-07-05
Information query
IPC分类:
