Invention Grant
- Patent Title: Integrated assemblies comprising stud-type capacitors
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Application No.: US16003571Application Date: 2018-06-08
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Publication No.: US10600788B2Publication Date: 2020-03-24
- Inventor: Gurtej S. Sandhu , Matthew N. Rocklein , Brett W. Busch
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L49/02

Abstract:
Some embodiments include an integrated capacitor assembly having a conductive pillar supported by a base, with the conductive pillar being included within a first electrode of a capacitor. The conductive pillar has a first upper surface. A dielectric liner is along an outer surface of the conductive pillar and has a second upper surface. A conductive liner is along the dielectric liner and is included within a second electrode of the capacitor. The conductive liner has a third upper surface. One of the first and third upper surfaces is above the other of the first and third upper surfaces. The second upper surface is at least as high above the base as said one of the first and third upper surfaces. Some embodiments include memory arrays having capacitors with pillar-type first electrodes.
Public/Granted literature
- US20190027478A1 Integrated Assemblies Comprising Stud-Type Capacitors Public/Granted day:2019-01-24
Information query
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