Invention Grant
- Patent Title: Plasma spray coating design using phase and stress control
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Application No.: US16231139Application Date: 2018-12-21
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Publication No.: US10604831B2Publication Date: 2020-03-31
- Inventor: Jennifer Y. Sun , Yikai Chen , Biraja Prasad Kanungo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C23C4/134
- IPC: C23C4/134 ; C23C4/11 ; C04B35/505 ; C04B35/48 ; C04B35/10
Abstract:
A ceramic coating is coated on a body of an article, wherein the ceramic coating includes Y2O3, Y4Al2O9, Y3Al5O12, or a solid-solution of Y2O3 mixed with at least one of ZrO2, Al2O3, HfO2, Er2O3, Nd2O3, Nb2O5, CeO2, Sm2O3 or Yb2O3. The ceramic coating is applied to the body by a method including providing a plasma spraying system having a plasma current in the range of between about 100 A to about 1000 A, positioning a torch standoff of the plasma spraying system a distance from the body between about 60 mm and about 250 mm, flowing a first gas through the plasma spraying system at a rate of between about 30 L/min and about 400 L/min, and plasma spray coating the body to form a ceramic coating, wherein splats of the coating are amorphous and have a pancake shape.
Public/Granted literature
- US20190136360A1 PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL Public/Granted day:2019-05-09
Information query
IPC分类:
