Invention Grant
- Patent Title: Process for large-scale ammonothermal manufacturing of semipolar gallium nitride boules
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Application No.: US16019528Application Date: 2018-06-26
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Publication No.: US10604865B2Publication Date: 2020-03-31
- Inventor: Mark P. D'Evelyn , Dirk Ehrentraut , Derrick S. Kamber , Bradley C. Downey
- Applicant: SLT Technologies, Inc
- Applicant Address: US CA Los Angeles
- Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee Address: US CA Los Angeles
- Agency: Patterson & Sheridan, LLP
- Main IPC: C30B19/02
- IPC: C30B19/02 ; C30B29/40 ; C30B7/10 ; C30B23/04 ; C30B25/04

Abstract:
Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
Public/Granted literature
- US20190003078A1 PROCESS FOR LARGE-SCALE AMMONOTHERMAL MANUFACTURING OF SEMIPOLAR GALLIUM NITRIDE BOULES Public/Granted day:2019-01-03
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