Invention Grant
- Patent Title: Method for producing a conductive through-plating for a substrate as well as conductive through-plating
-
Application No.: US16475755Application Date: 2018-04-06
-
Publication No.: US10607888B2Publication Date: 2020-03-31
- Inventor: Christoph Schelling , Johannes Classen , Simon Genter
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102017205964 20170407
- International Application: PCT/EP2018/058818 WO 20180406
- International Announcement: WO2018/185262 WO 20181011
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/48 ; H01L23/00

Abstract:
A conductive through-plating for a substrate includes a metal component, a first conductive structure situated on or in the environment of a surface of the substrate, and a second conductive structure situated on or in the environment of a further surface of the substrate. A method for producing the through-plating includes, in a first step, at least partially applying above the surface a grid structure that includes a group of openings; in a second step following the first step, carrying out an etching producing a trench in the substrate and at least partially also underneath the group of openings; and, in a fifth step following the second step, carrying out a metallization situating a metal component at least partially in the trench such that the metal component is part of a seal sealing the trench in the area of the surface.
Information query
IPC分类: