Invention Grant
- Patent Title: Middle of line structures
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Application No.: US15898569Application Date: 2018-02-17
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Publication No.: US10607893B2Publication Date: 2020-03-31
- Inventor: Hui Zang , Ruilong Xie
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/08 ; H01L29/66 ; H01L27/088

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to middle of line structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and drain regions; contacts connecting to the source and drain regions; contacts connecting to the gate structures which are offset from the contacts connecting to the source and drain regions; and interconnect structures in electrical contact with the contacts of the gate structures and the contacts of the source and drain regions.
Public/Granted literature
- US20190259667A1 MIDDLE OF LINE STRUCTURES Public/Granted day:2019-08-22
Information query
IPC分类: