Invention Grant
- Patent Title: Memory devices including memory cells and related methods
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Application No.: US16111357Application Date: 2018-08-24
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Publication No.: US10608012B2Publication Date: 2020-03-31
- Inventor: Guangyu Huang , Haitao Liu , Chandra V. Mouli , Srinivas Pulugurtha
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/02 ; H01L29/16 ; H01L29/20 ; H01L29/24 ; H01L29/04 ; H01L29/165 ; H01L29/66 ; H01L29/22 ; H01L21/28

Abstract:
Memory devices and electronic systems include an array of vertical memory cells positioned along respective vertical channels to define vertical memory strings. Each of the vertical channels includes a channel material exhibiting an electron mobility of at least about 30 cm2/(V·s) and a room temperature band gap of at least about 1.40 eV (e.g., zinc oxide, silicon carbide, indium phosphide, indium gallium zinc oxide, gallium arsenide, or molybdenum disulfide) and a bottom plug material exhibiting a room temperature band gap of less than about 1.10 eV (e.g., silicon germanium, germanium, or indium gallium arsenide). Methods of fabricating a memory device include forming such a bottom plug material within vertical channels and forming such a channel material electrically coupled to the bottom plug material.
Public/Granted literature
- US20190067326A1 MEMORY DEVICES INCLUDING VERTICAL MEMORY CELLS AND RELATED METHODS Public/Granted day:2019-02-28
Information query
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