- 专利标题: Method for producing pillar-shaped semiconductor memory device
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申请号: US16148099申请日: 2018-10-01
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公开(公告)号: US10651189B2公开(公告)日: 2020-05-12
- 发明人: Fujio Masuoka , Nozomu Harada
- 申请人: Unisantis Electronics Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- 当前专利权人地址: SG Singapore
- 代理机构: Brinks Gilson & Lione
- 主分类号: H01L27/1157
- IPC分类号: H01L27/1157 ; H01L29/792 ; H01L27/11582 ; H01L27/11565 ; H01L21/28 ; H01L27/11575 ; H01L27/11573
摘要:
A method for producing a pillar-shaped semiconductor memory device includes forming a mask on a semiconductor substrate and etching to form a semiconductor pillar on the semiconductor substrate. A tunnel insulating layer is formed and a data charge storage insulating layer is formed so as to surround the tunnel insulating layer, and a first conductor layer and a second interlayer insulating layer are formed on the semiconductor pillar. A stacked material layer is formed in a direction perpendicular to an upper surface of the semiconductor substrate, the stacked material layer including the first conductor layer and the second interlayer insulating layer. Data writing and erasing due to charge transfer between the semiconductor pillar and the data charge storage insulating layer through the tunnel insulating layer is performed by application of a voltage to the first conductor layer.
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