Invention Grant
- Patent Title: Methods of forming gate contact structures and cross-coupled contact structures for transistor devices
-
Application No.: US15791650Application Date: 2017-10-24
-
Publication No.: US10651284B2Publication Date: 2020-05-12
- Inventor: Ruilong Xie , Youngtag Woo , Daniel Chanemougame , Bipul C. Paul , Lars W. Liebmann , Heimanu Niebojewski , Xuelian Zhu , Lei Sun , Hui Zang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L27/092 ; H01L29/78 ; H01L21/28 ; H01L29/66 ; H01L29/417 ; H01L21/8234 ; H01L27/088

Abstract:
One illustrative method disclosed includes, among other things, selectively forming a gate-to-source/drain (GSD) contact opening and a CB gate contact opening in at least one layer of insulating material and forming an initial gate-to-source/drain (GSD) contact structure and an initial CB gate contact structure in their respective openings, wherein an upper surface of each of the GSD contact structure and the CB gate contact structure is positioned at a first level, and performing a recess etching process on the initial GSD contact structure and the initial CB gate contact structure to form a recessed GSD contact structure and a recessed CB gate contact structure, wherein a recessed upper surface of each of these recessed contact structures is positioned at a second level that is below the first level.
Public/Granted literature
- US20190123162A1 METHODS OF FORMING GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TRANSISTOR DEVICES Public/Granted day:2019-04-25
Information query
IPC分类: