Invention Grant
- Patent Title: Polarization module and laser apparatus including the same
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Application No.: US15175649Application Date: 2016-06-07
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Publication No.: US10654130B2Publication Date: 2020-05-19
- Inventor: Joo Woan Cho , Byoung Ho Cheong , Oleg Prudnikov , Jeong Kyun Na , Joon-Hwa Bae , Seung Hwan Lee , Byoung Kwon Choo
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: unknown Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD
- Current Assignee: SAMSUNG DISPLAY CO., LTD
- Current Assignee Address: unknown Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6917b856
- Main IPC: G02B5/30
- IPC: G02B5/30 ; G02B27/28 ; B23K26/354 ; G02B27/09 ; G03F7/20 ; B23K26/067 ; B23K26/073 ; G02B5/04 ; G02B13/02

Abstract:
A polarization module and a laser exposure apparatus have a polarization module including a first lens and a second lens that reduce a one-directional length of a cross-section of an incident laser beam having an optical axis. A polarization beam splitter divides the laser beam passing through the first and second lenses into two laser beams that are polarized in different directions with respect to each other. A first prism lens and a second prism lens emit an output laser beam by controlling the two laser beams that are divided by the polarization beam splitter to positions that are symmetrical with respect to the optical axis. At least one half wave plate is disposed between the polarization beam splitter and the first prism lens.
Public/Granted literature
- US20170087664A1 POLARIZATION MODULE AND LASER APPARATUS INCLUDING THE SAME Public/Granted day:2017-03-30
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