Invention Grant
- Patent Title: MEMS device
-
Application No.: US15847080Application Date: 2017-12-19
-
Publication No.: US10654717B2Publication Date: 2020-05-19
- Inventor: Euan James Boyd
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@55a59242
- Main IPC: B81C99/00
- IPC: B81C99/00 ; B81B7/00 ; G01R31/28 ; G01D5/24 ; H04R19/00 ; H04R29/00

Abstract:
A MEMS transducer, for instance a MEMS capacitive transducer, comprising: a flexible membrane, the flexible membrane comprising a conductive track; and a continuity testing circuit electrically connected to the conductive track. The conductive track may be electrically isolated from any further conductive regions of the flexible membrane. The continuity testing circuit is configured to test the continuity of the conductive track.
Public/Granted literature
- US20180170749A1 MEMS DEVICE Public/Granted day:2018-06-21
Information query