Invention Grant

MEMS device
Abstract:
A MEMS transducer, for instance a MEMS capacitive transducer, comprising: a flexible membrane, the flexible membrane comprising a conductive track; and a continuity testing circuit electrically connected to the conductive track. The conductive track may be electrically isolated from any further conductive regions of the flexible membrane. The continuity testing circuit is configured to test the continuity of the conductive track.
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