A semiconductor package includes a lower chip, an upper chip on the lower chip, and an adhesive layer between the lower chip and the upper chip. The lower chip has first through silicon vias (TSVs) and pads on an upper surface thereof. The pads are connected to the first TSVs, respectively. The upper chip includes bumps on a lower surface thereof. The bumps are bonded to the pads. Vertical centerlines of the bumps are aligned with vertical centerlines of the first TSVs, respectively. The vertical centerlines of the bumps are offset from the vertical centerlines of the pads, respectively, in a peripheral region of the lower chip.