Invention Grant
- Patent Title: Method for magnetic device alignment on an integrated circuit
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Application No.: US15808996Application Date: 2017-11-10
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Publication No.: US10658575B2Publication Date: 2020-05-19
- Inventor: Kerry Joseph Nagel
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: Everspin Technologies, Inc.
- Current Assignee: Everspin Technologies, Inc.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff McAndrews, PLLC
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L23/544 ; H01L43/02 ; H01L43/08

Abstract:
Techniques are presented for ensuring alignment marks are available for use and patterning magnetoresistive devices following the deposition of layers used to form the magnetoresistive devices. In some cases, the plurality of layers corresponding to the magnetoresistive devices are selectively etched in order to expose the underlying alignment marks, whereas in other embodiments, the deposition of the plurality of layers is controlled by deposition tool tabs that prevent the materials from obscuring the underlying alignment marks.
Public/Granted literature
- US20180138396A1 METHOD AND APPARATUS FOR MAGNETIC DEVICE ALIGNMENT ON AN INTEGRATED CIRCUIT Public/Granted day:2018-05-17
Information query
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