Invention Grant
- Patent Title: Devices and methods for parameter measurement
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Application No.: US16163661Application Date: 2018-10-18
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Publication No.: US10667754B2Publication Date: 2020-06-02
- Inventor: Peter Starr , Steven Bailey , Mauli Agrawal
- Applicant: THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM
- Applicant Address: US TX Austin
- Assignee: The Board of Regents of The University of Texas System
- Current Assignee: The Board of Regents of The University of Texas System
- Current Assignee Address: US TX Austin
- Agency: Parker Highlander PLLC
- Main IPC: G01L9/00
- IPC: G01L9/00 ; A61B5/00 ; A61B5/0215 ; A61B5/103 ; A61M1/10 ; A61B5/1473 ; A61B7/02 ; A61F2/24 ; B29C65/48 ; A61B5/145 ; A61B17/00 ; A61M1/12 ; A61B5/03 ; B29L31/00

Abstract:
A thin-film, diaphragm based device is disclosed which can be used to perform an array of sensing and actuating operations where a very thin profile is desired, such as in millimeter, micrometer, or nanometer tight spaces.
Public/Granted literature
- US20190282173A1 DEVICES AND METHODS FOR PARAMETER MEASUREMENT Public/Granted day:2019-09-19
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