公开(公告)号：US10667754B2

公开(公告)日：2020-06-02

申请号：US16163661

申请日：2018-10-18

Applicant: THE BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM

Inventor： Peter Starr ,  Steven Bailey ,  Mauli Agrawal

IPC: G01L9/00 ,  A61B5/00 ,  A61B5/0215 ,  A61B5/103 ,  A61M1/10 ,  A61B5/1473 ,  A61B7/02 ,  A61F2/24 ,  B29C65/48 ,  A61B5/145 ,  A61B17/00 ,  A61M1/12 ,  A61B5/03 ,  B29L31/00

Abstract: A thin-film, diaphragm based device is disclosed which can be used to perform an array of sensing and actuating operations where a very thin profile is desired, such as in millimeter, micrometer, or nanometer tight spaces.