Invention Grant
- Patent Title: Imprint template treatment apparatus
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Application No.: US15717435Application Date: 2017-09-27
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Publication No.: US10668496B2Publication Date: 2020-06-02
- Inventor: Satoshi Nakamura , Kensuke Demura , Daisuke Matsushima , Masayuki Hatano , Hiroyuki Kashiwagi
- Applicant: SHIBAURA MECHATRONICS CORPORATION , TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Yokohama-shi JP Minato-ku
- Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Yokohama-shi JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6bd46ed5 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7c0d14c6
- Main IPC: B05C5/02
- IPC: B05C5/02 ; B29C33/38 ; G03F7/00 ; B29C59/02

Abstract:
According to one embodiment, an imprint template manufacturing apparatus includes a stage, a supply head, a moving mechanism, and a controller. The stage supports a template that includes a base having a main surface, and a convex portion provided on the main surface and having an end surface on a side opposite to the main surface. A concavo-convex pattern to be pressed against a liquid material to be transferred is formed on the end surface. The supply head supplies a liquid-repellent material in a liquid form to the template on the stage. The moving mechanism moves the stage and the supply head relative to each other in a direction along the stage. The controller controls the supply head and the moving mechanism such that the supply head applies the liquid-repellent material to at least the side surface of the convex portion so as to avoid the concavo-convex pattern.
Public/Granted literature
- US20180015497A1 IMPRINT TEMPLATE MANUFACTURING APPARATUS Public/Granted day:2018-01-18
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